Solid-state imaging device

ABSTRACT

In a solid-state imaging device, a photoelectric conversion unit, a transfer transistor, and at least a part of electric charge holding unit, among pixel constituent elements, are disposed on a first semiconductor substrate. An amplifying transistor, a signal processing circuit other than a reset transistor, and a plurality of common output lines, to which signals are read out from a plurality of pixels, are disposed on a second semiconductor substrate.

TECHNICAL FIELD

The present invention relates to a solid-state imaging device, and, inparticular, to a solid-state imaging device including a photoelectricconversion unit and a pixel circuit separately disposed on differentsubstrates.

BACKGROUND ART

There is known a solid-state imaging device including a photoelectricconversion unit and a pixel circuit which are separately disposed ondifferent substrates, and are electrically connected to each other via,for example, a microbump.

Japanese Patent Application Laid-Open No. 2009-170448 discusses aconfiguration in which an amplifying transistor and a selectiontransistor constituting a pixel circuit are disposed on a secondsemiconductor substrate, or only the selection transistor is disposed onthe second semiconductor substrate.

In addition, Japanese Patent Application Laid-Open No. 2008-235478discusses a solid-state imaging device including a first chip and asecond chip. A plurality of light receiving pixels of the first chip isarranged on a light receiving surface, and generates electric signalsaccording to incident light. Then, the electric signals of the lightreceiving pixels are transmitted to the back surface of the lightreceiving surface via through-wiring. A readout circuit is formed on thesecond chip. The readout circuit reads out the electric signals via thethrough-wiring, and outputs them as image signals. In this solid-stateimaging device, the first chip and the second chip are disposed in suchorientations that the back surface of the first chip and the readoutcircuit of the second chip face each other, and the terminals of thethrough-wiring and the readout circuit are electrically connected toeach other. Japanese Patent Application Laid-Open No. 2008-235478further discusses that a global electronic shutter is realized byproviding, for example, a memory area for storing signal electriccharges to each pixel, and a digital image signal is output by adding ananalog/digital (AD) conversion circuit to each pixel.

However, the configuration discussed in Japanese Patent ApplicationLaid-Open No. 2009-170448 is not sufficient to satisfy the functionalityof solid-state imaging devices, which has been increasingly diversifiedin recent years. For example, a pixel additional circuit should beprovided to, for example, expand the dynamic range, attain theelectronic shutter function, and realize AD conversion at each pixel.

On the other hand, Japanese Patent Application Laid-Open No. 2008-235478discusses that a pixel additional circuit such as a memory area and anAD conversion circuit is provided to each pixel. Further, JapanesePatent Application Laid-Open No. 2008-235478 discusses that the readoutcircuit disposed on the second chip is shielded from light.

However, Japanese Patent Application Laid-Open No. 2008-235478 fails toclearly describe the specific details of the light shielding structure.On the contrary, Japanese Patent Application Laid-Open No. 2008-235478even discusses that it is possible to omit a light shielding layer orreduce the thickness of the light shielding layer since the upperportion of the readout circuit is covered with the first chip. However,the addition of the pixel additional circuit, which enables theexpansion of the dynamic range, the attainment of the electronic shutterfunction, and the realization of AD conversion at each pixel, requires amore secure light shielding structure to be established.

SUMMARY OF INVENTION

The present invention is directed to a solid-state imaging deviceincluding a pixel additional circuit provided with an effective lightshielding structure.

According to an aspect of the present invention, a solid-state imagingdevice includes a photoelectric conversion unit, a transfer unitconfigured to transfer signal electric charges of the photoelectricconversion unit to a floating node, a reset unit configured to set anelectric potential of the floating node to a reference electricpotential, an amplifying unit configured to amplify a signal generatedbased on the signal electric charges transferred to the floating node,and a pixel array including a plurality of pixels each including a pixeladditional circuit configured to process the signal electric chargestransferred to the floating node or the signal amplified by theamplifying unit. In the solid-state imaging device, the photoelectricconversion unit, the transfer unit, and the floating node are disposedon a first substrate, the pixel additional circuit is disposed on asecond substrate, and a first light shielding member is disposed on thefirst substrate. The first light shielding member is configured toreduce light transmitted through the photoelectric conversion unit toenter the pixel additional circuit.

According to an exemplary embodiment of the present invention, it ispossible to perform advanced signal processing at each pixel withoutreducing the area of the photoelectric conversion region.

Further features and aspects of the present invention will becomeapparent from the following detailed description of exemplaryembodiments with reference to the attached drawings.

BRIEF DESCRIPTION OF DRAWINGS

The accompanying drawings, which are incorporated in and constitute apart of the specification, illustrate exemplary embodiments, features,and aspects of the invention and, together with the description, serveto explain the principles of the invention.

FIG. 1 is an equivalent circuit diagram of a pixel according to a firstexemplary embodiment of the present invention.

FIG. 2A illustrates an example of a drive pulse supplied to the pixelaccording to the first exemplary embodiment.

FIG. 2B illustrates an example of a drive pulse supplied to the pixelaccording to the first exemplary embodiment.

FIG. 3 is a cross-sectional view of a solid-state imaging deviceaccording to the first exemplary embodiment.

FIG. 4A illustrates a first example of the plan views of the solid-stateimaging device according to the first exemplary embodiment.

FIG. 4B illustrates the first example of the plan views of thesolid-state imaging device according to the first exemplary embodiment.

FIG. 5A illustrates a second example of the plan views of thesolid-state imaging device according to the first exemplary embodiment.

FIG. 5B illustrates the second example of the plan views of thesolid-state imaging device according to the first exemplary embodiment.

FIG. 6A illustrates a third example of the plan views of the solid-stateimaging device according to the first exemplary embodiment.

FIG. 6B illustrates the third example of the plan views of thesolid-state imaging device according to the first exemplary embodiment.

FIG. 7A illustrates a fourth example of the plan views of thesolid-state imaging device according to the first exemplary embodiment.

FIG. 7B illustrates the fourth example of the plan views of thesolid-state imaging device according to the first exemplary embodiment.

FIG. 8A illustrates an example of a drive pulse according to a firstvariation of the first exemplary embodiment.

FIG. 8B illustrates an example of a drive pulse according to the firstvariation of the first exemplary embodiment.

FIG. 9 is an equivalent circuit diagram of a pixel according to a secondvariation of the first exemplary embodiment.

FIG. 10A illustrates an example of a drive pulse according to the secondvariation of the first exemplary embodiment.

FIG. 10B illustrates an example of a drive pulse according to the secondvariation of the first exemplary embodiment.

FIG. 11 is an equivalent circuit diagram of a pixel according to asecond exemplary embodiment of the present invention.

FIG. 12 is an equivalent circuit diagram of a pixel according to a thirdexemplary embodiment of the present invention.

DESCRIPTION OF EMBODIMENTS

Various exemplary embodiments, features, and aspects of the inventionwill be described in detail below with reference to the drawings.

The present invention relates to a solid-state imaging device includinga first substrate with a photoelectric conversion unit disposed thereonand a second substrate with a pixel additional circuit disposed thereon.More specifically, the first substrate is provided with a first lightshielding member for reducing light transmitted through thephotoelectric conversion unit to enter the pixel additional circuit. Thepixel additional circuit is a circuit which applies some signalprocessing to a signal generated at the photoelectric conversion unit,or a signal amplified from such a signal.

FIG. 1 is an equivalent circuit diagram of a pixel according to a firstexemplary embodiment of the present invention. FIG. 1 illustrates onlyone pixel, but in practical use, a plurality of pixels is combined toconstruct a pixel array. The present exemplary embodiment includes acapacitance for switching the sensitivity as the pixel additionalcircuit.

A photoelectric conversion unit 101 performs photoelectric conversionupon an entry of light, and generates a hole and an electron. Thephotoelectric conversion unit 101 is embodied by, for example, aphotodiode.

A transfer unit 102 transfers the electric charges of the photoelectricconversion unit 101 to a floating node 103, which is a unit for readingout signals. The transfer unit 102 is embodied by, for example, a metaloxide semiconductor (MOS) transistor (transfer MOS transistor).

The floating node 103 is a unit for reading out signals. The floatingnode 103 includes, for example, a floating diffusion (hereinafterreferred to as “FD”).

A reset unit 104 sets at least the electric potential of the floatingnode 103 to a reference electric potential. Further, turning on thereset unit 104 and the transfer unit 102 at the same time may set theelectric potential of the photoelectric conversion unit 101 to thereference electric potential. The reset unit 104 is embodied by, forexample, an MOS transistor (reset MOS transistor).

An amplifying unit 105 amplifies a signal generated based on one of anelectric charge pair generated at the photoelectric conversion unit 101,and outputs the amplified signal. The amplifying circuit 105 is embodiedby, for example, an MOS transistor (amplifying MOS transistor). Theexample illustrated in FIG. 1 is configured such that the gate of theamplifying MOS transistor and the floating node 103 are electricallyconnected to each other.

A transfer control line 106 is used to control an operation of thetransfer unit 102.

A reset control line 107 is used to control an operation of the resetunit 104. If the transfer unit 102 and the reset unit 104 are MOStransistors, the control lines 106 and 107 are wiring for transmitting apulse for turning on/off the corresponding MOS transistor to the gate ofthe MOS transistor.

A common output line 108 is a line to which a signal amplified at theamplifying unit 105 is output. Signals from the plurality of pixelsincluded in the pixel array are read out thereto. If the common outputline 108 is provided for each pixel row, each common output line 108 canbe referred to as a vertical output line, and signals are sequentiallyread out from a plurality of pixels included in a pixel row.

The configuration of the pixel is connected to a current source 109. Thecurrent source 109 supplies bias current to the amplifying unit 105. Inthe present circuit configuration, the current source 109 supplies biascurrent for causing the MOS transistor of the amplifying unit 105 toperform a source follower operation.

The configuration of the pixel further includes a pixel additionalcircuit 110. The pixel additional circuit 110 includes a switch 111 anda capacitance 112. The pixel additional circuit 110 is configured suchthat one of the nodes of the capacitance 112 is connectable to thefloating node 103 via the switch 111. Predetermined voltage, the groundpotential in this example, is supplied to the other node of thecapacitance 112.

Further, a selection transistor (not illustrated) for controllingselection of a pixel may be provided between the pixel additionalcircuit 110 and the common output line 108.

Control wiring 113 is used to control the conduction of the switch 111.Voltage V1 is voltage supplied to drains of the MOS transistorsrespectively constituting the amplifying unit 105 and the reset unit104. In this example, the voltage V1 is described as common voltage, butmay be realized by different power sources by providing separate systemsof voltage supply wiring. Voltage V2 is voltage supplied to the currentsource 109.

Among the elements constituting the pixel, a zone pixA indicateselements disposed on the first substrate, and a zone pixB indicateselements disposed on the second substrate. The pixel pix is constitutedby the zones pixA and pixB. More specifically, the photoelectricconversion unit 101, the transfer unit 102, and the FD constituting apart of the floating node 103 are disposed on the first substrate. Onthe other hand, the pixel additional circuit 110 is disposed on thesecond substrate. Further, the reset unit 104, the amplifying unit 105,the common output line 108, and the current source 109 are disposed onthe second substrate. The FD is electrically connected to the gate ofthe amplifying MOS transistor and the source of the reset MOStransistor.

The configuration of the pixel has been described concretely in theabove paragraphs, but the configuration of the pixel is not limited tothe described one. For example, the transistor constituting theamplifying unit 105 may be embodied by a junction gate field-effecttransistor (JFET). Further, the pixel may be configured such that a holeis used as signal electric charges. This can be realized by adopting apositive-channel MOS (PMOS) transistor as the transfer MOS transistor.Further, the pixel may be configured such that the amplifying unit 105and the reset unit 104 are shared by a plurality of photoelectricconversion units 101.

Further, the respective constituent elements of the pixel may be dividedto the plurality of substrates in a different manner from the abovedescribed arrangement. Besides the above-described arrangement, thereset unit 104 and the amplifying unit 105 may be arranged on the firstsubstrate. However, the pixel additional circuit 110 should be arrangedon the second substrate.

Next, a concrete operation of the pixel additional circuit 110 will bedescribed. The following description will be given, assuming that thetransfer unit 102, the reset unit 104, and the amplifying unit 105 areembodied by MOS transistors, and electrons are used as signal electriccharges.

The photoelectric conversion unit 101, the transfer MOS transistorconstituting the transfer unit 102, and the FD are disposed on the firstsubstrate. The reset MOS transistor, the amplifying MOS transistor, andthe pixel additional circuit 110 are disposed on the second substrate.Signal electric charges generated at the photoelectric conversion unit101 are transferred to the floating node 103 by the transfer unit 102.The signal electric charges transferred to the floating node 103 areconverted into voltage according to the capacitance of the floating node103. A change amount V of this voltage is in a relationship expressed bythe equation V=q/C, in which “C” represents a capacitance value of thefloating node, and “q” represents an amount of signal electric charge.Therefore, a reduction in the capacitance value of the floating node 103leads to an increase in the voltage change amount V and therebyenhancement of the sensitivity. On the other hand, an increase in thecapacitance value of the floating node 103 leads to a decline in thesensitivity.

The pixel additional circuit 110 functions to switch this pixelsensitivity. A combination of the switch 111 and the capacitance 112enables the capacitance value of the floating node 103 to be switched.More specifically, when a high-level pulse is supplied to the controlwiring 113 to turn on the switch 111, the capacitance 112 is added tothe capacitance of the floating node 103. As a result, the totalcapacitance value of the floating node 103 is increased, leading to adecline in the pixel sensitivity (low-sensitivity mode). When alow-level pulse is supplied to the control wiring 113 to turn off theswitch 111, the capacitance 112 is separated from the floating node 103.As a result, the total capacitance value of the floating node 103 isreduced, leading to enhancement of the pixel sensitivity(high-sensitivity mode). Capturing an image while appropriatelyswitching the sensitivity between the high-sensitivity mode and thelow-sensitivity mode enables an expansion of the dynamic range ofsignals constituting the image. Further, the capacitance 112 may be usedas an area where the photoelectric conversion unit 101 holds overflowelectric charges after saturation.

FIGS. 2A and 2B each illustrate an example of a drive pulse supplied tothe pixel. In particular, FIG. 2A illustrates a drive pulse of thehigh-sensitivity mode, and FIG. 2B illustrates a drive pulse of thelow-sensitivity mode. At all units and circuits, a supply of ahigh-level pulse establishes a conduction state, while a supply of alow-level pulse results in a non-conduction state.

A common part shared by the drive sequence of the high-sensitivity modeand the drive sequence of the low-sensitivity mode is as follows. First,the pulse supplied to the reset control line 107 is changed from thehigh level to the low level. This stops the reset operation of supplyingthe reference electric potential to the floating node 103.

Then, the pulse supplied to the transfer control line 106 is changedfrom the low level to the high level, causing the signal electriccharges of the photoelectric conversion unit 101 to be transferred tothe floating node 103. During these operations, the selected pixelmaintains high voltage as the V1, and is in a state capable ofoutputting a signal to the common output line 108. On the other hand, anunselected pixel has low voltage as the V1.

A difference between the drive sequence of the high-sensitivity mode andthe drive sequence of the low-sensitivity mode is the pulse supplied tothe control line 113. In the high-sensitive mode, this pulse ismaintained at the low level, while in the low-sensitivity mode, thispulse is maintained at the high level. This operation results in such astate that, in the high-sensitivity mode, the capacitance 112 isseparated from the floating node 103, while in the low-sensitivity mode,the capacitance 112 is connected to the floating node 103.

FIG. 3 is a schematic cross-sectional view illustrating the electricconnection between the elements disposed on the first substrate and theelements disposed on the second substrate. FIG. 3 illustrates a crosssection of two pixels for facilitating better understanding of the factthat pixel units are repeatedly arranged.

The cross-sectional view illustrates a first substrate 201A on which thephotoelectric conversion unit 101 is disposed, and a second substrate201B on which the pixel additional circuit is disposed.

The first substrate 201A includes a first semiconductor substrate 202A,and a first insulating film 203A disposed on the first semiconductorsubstrate 202A. The first insulating film 203A is an interlayerinsulating film, and serves to provide insulation between a plurality ofwiring layers. The first insulating film 203A may be constructed bylaminating a plurality of insulating films.

The second substrate 201B includes a second semiconductor substrate202B, and a second insulating film 203B disposed on the secondsemiconductor substrate 202B. The second insulating film 203B is aninterlayer insulating film, like the first insulating film 203A. Thesecond insulating film 203B may be constructed by laminating a pluralityof insulating films.

The elements in the cross section corresponding to the elements in theequivalent circuit diagram illustrated in FIG. 1 are identified by thesame reference numerals as those in FIG. 1, and will not be described indetail.

The first semiconductor substrate 202A includes a negative (N)-typesemiconductor region 101 a. This region can store an electron which isthe signal electric charges. The first semiconductor substrate 202Afurther includes a first positive (P)-type semiconductor region 101 b,and a second P-type semiconductor region 101 c. The N-type semiconductorregion 101 a, the first P-type semiconductor region 101 b, and thesecond P-type semiconductor region 101 c constitute the photodiodeserving as the photoelectric conversion unit 101. The second P-typesemiconductor region 101 c also functions as a well which provides achannel of the transfer MOS transistor. The arrows in FIG. 3 indicateincident light. The present exemplary embodiment is abackside-illumination-type solid-state imaging device in which lightenters from the surface on the other side of the surface where the firstP-type semiconductor region 101 b is located, i.e., the surface providedwith, for example, the wiring.

A third P-type semiconductor region 210 is used to supply referencevoltage to the first and second P-type semiconductor regions 101 b and101 c. The reference voltage is supplied to the third P-typesemiconductor region 210 via a contact plug and a power supply line. Thethird P-type semiconductor region 210 has higher impurity concentrationthan that of the first and second P-type semiconductor regions 101 b and101 c. The supplied reference voltage is, for example, the groundpotential.

The electric connection between the first substrate 201A and the secondsubstrate 201B is established by electrically connecting conductorsdisposed on the first and second insulating films 203A and 203B. Theelectric connection can be established without use of the through-wiringextending through the first and second semiconductor substrates 202A and202B.

The switch 111 and the capacitance 112 constituting the pixel additionalcircuit 110 are not disposed on the first substrate 201A where thephotoelectric conversion unit 101 is disposed, but are disposed on thesecond substrate 201B where the photoelectric conversion unit 101 is notdisposed. This arrangement enables the photoelectric conversion unit 101to have a sufficiently large aperture, thereby improving thesensitivity. Further, this arrangement enables the capacitance 112 tooccupy a large area, and thereby enables the sensitivity in thelow-sensitivity mode to be further reduced. As a result, it becomespossible to output a signal of excellent linearity even in response toan entry of light having a great light amount.

Further, according to the configuration of the present exemplaryembodiment, it is possible to improve the light shielding performance ofthe pixel additional circuit 110. When light is incident on the switch111 and the capacitance 112, which constitute the pixel additionalcircuit 110, and the semiconductor region connected to them, this maychange the level of a signal held in the capacitance 112. If the pixeladditional circuit 110 is disposed on the first substrate 201A, it wouldbe difficult to reduce light incident on the above-describedsemiconductor region and the like, since the first substrate 201Aincludes the photoelectric conversion unit 101 disposed thereon. On thecontrary, disposing the pixel additional circuit 110 on the secondsubstrate 201B where the photoelectric conversion unit 101 is notdisposed enables a sufficient reduction in the light incident onto theabove-described semiconductor region and the like. Further, the presentexemplary embodiment is configured such that the pixel additionalcircuit 110 is entirely planarly covered with use of at least a part ofa light shielding member disposed on the first substrate 201A. Thisplanar configuration will be concretely described in further detail withreference to FIGS. 4A and 4B to FIGS. 7A and 7B.

Further, in the present exemplary embodiment, the wiring of the firstsubstrate 201A and the wiring of the second substrate 201B are used toshield the switch 111, the capacitance 112, and the semiconductor regionconnected to them from light. Alternatively, the present exemplaryembodiment may further include a member dedicated to light shielding.

FIGS. 4A and 4B are plan views corresponding to FIG. 3. Especially,FIGS. 4A and 4B illustrate the extracted portion so as to facilitatebetter understanding of the positional relationship among the respectivecircuit elements and the light shielding member related to the presentexemplary embodiment. FIG. 4A is a perspective view of the firstsubstrate 201A as viewed from above, and FIG. 4B is a perspective viewof the second substrate 201B as viewed from above.

The configuration illustrated in FIGS. 4A and 4B includes aphotoelectric conversion unit 301, a transfer gate 302 included in thetransfer unit, and an FD 303 included in the floating node. A conductionpattern 304 constitutes the wiring for electrically connecting the FD303 and the gate of the amplifying MOS transistor of the pixel. Aconductor pattern 305 constitutes the wiring for supplying the referencevoltage to the third P-type semiconductor region 101 c. Theconfiguration illustrated in FIGS. 4A and 4B further includes a pixelcircuit arrangement region 306 and a pixel additional circuitarrangement region 307. A conduction pattern 308 constitutes the wiringfor connecting the FD 303, the gate of the amplifying MOS transistor,and the source of the reset MOS transistor. A conduction pattern 309constitutes the wiring for electrically connecting the switch and thecapacitance of the pixel additional circuit. The conduction patterns 304and 305 serve as a first light shielding member disposed on the firstsubstrate 201A. The conduction patterns 308 and 309 serve as a secondlight shielding member disposed on the second substrate 201B. The firstlight shielding member and the second light shielding member can reducean entry of light into at least a part of the pixel additional circuitregion 307. In some embodiments, the first light shielding member andthe second light shielding member can reduce an entry of light into theentire pixel additional circuit region 307.

Now, the position and the shape of the second light shielding memberwill be described. In FIGS. 4A and 4B, the regions defined by verticallyprojecting the first light shielding member to the second substrate sidedo not cover entirely planarly the pixel additional circuit arrangementregion 307. This is because there is a space between the conductionpatters 304 and 305. In this case, the second light shielding member maybe disposed at a position corresponding to this space so as to be ableto effectively block light transmitted through this space.

Other examples of the light shielding member will be described withreference to FIGS. 5A and 5B to FIGS. 7A and 7B. FIGS. 5A and 5Billustrate a second example of the plan views of the solid-state imagingdevice according to the present exemplary embodiment. FIG. 5A is aperspective view of the first substrate as viewed from above, and FIG.5B is a perspective view of the second substrate as viewed from above.Although FIGS. 5A and 5B illustrate 2×2 pixels, the solid-state imagingdevice may include a larger number of pixels.

The configuration illustrated in FIGS. 5A and 5B includes a first lightshielding member 400 a disposed on the first substrate, and a projectionregion 400 b which is a region defined by vertically projecting thefirst light shielding member 400 a onto the second substrate side. Theconfiguration illustrated in FIGS. 5A and 5B further includes aphotoelectric conversion unit 401, a transfer unit 402, and an FD 403included in the floating node. The configuration illustrated in FIGS. 5Aand 5B further includes a pixel circuit arrangement region 404 and apixel additional circuit arrangement region 405. The second substratedoes not have a light shielding member disposed thereon.

The pixel additional circuit arrangement region 405 is located withinthe projection region 400 b defined by vertically projecting the firstshielding member 400 a onto the second substrate side, and is notlocated outside the projection region 400 b. The first light shieldingmember 400 a planarly covers a part of the photoelectric conversion unit401, and the projection region 400 b thereof covers the entire pixeladditional circuit arrangement region 405. Further, the projectionregion 400 b also planarly covers a part of the pixel circuitarrangement region 404.

This arrangement enables light transmitted through the photoelectricconversion unit 401 to be reflected to the photoelectric conversion unit401, thereby increasing the sensitivity, and at the same time, enablesreduction of an entry of light into the pixel additional circuit.

FIGS. 6A and 6B illustrate a third example of the plan views of thesolid-state imaging device according to the present exemplaryembodiment. FIG. 6A is a perspective view of the first substrate asviewed from above, and FIG. 6B is a perspective view of the secondsubstrate as viewed from above. A difference from the arrangementsillustrated in FIGS. 4A and 4B and FIGS. 5A and 5B is that theprojection region of the first light shielding member planarly coversthe entire pixel additional circuit, but does not cover the pixelcircuit.

The configuration illustrated in FIGS. 6A and 6B includes a first lightshielding member 500 a disposed on the first substrate, and a projectionregion 500 b defined by vertically projecting the first light shieldingmember 500 a to the second substrate side. This configuration furtherincludes a photoelectric conversion unit 501, a transfer unit 502, an FD503 included in the floating node, a pixel circuit arrangement region504, and a pixel additional circuit arrangement region 505.

The pixel additional circuit may be required to have higher lightshielding performance than the pixel circuit. Especially, the pixeladditional circuit including a capacitance, which occupies a large area,is required to have further higher light shielding performance. In thiscase, a configuration planarly shielding only the pixel additionalcircuit, like the present example, is one possible solution. However,since a conduction pattern constituting the wiring of the pixel circuitis disposed on the pixel circuit region, this conduction pattern mayhave a predetermined light shielding capability to also serve as a lightshielding member.

FIGS. 7A and 7B illustrate a fourth example of the plan views of thesolid-state imaging device of the present exemplary embodiment. FIG. 7Ais a perspective view of the first substrate as viewed from above, andFIG. 7B is a perspective view of the second substrate as viewed fromabove. Although FIGS. 7A and 7B illustrate 2×2 pixels, the solid-stateimaging device may include a larger number of pixels. A difference ofthe fourth example from the second and third examples is that a secondlight shielding member is disposed on the second substrate.

The configuration illustrated in FIGS. 7A and 7B includes aphotoelectric conversion unit 601, a transfer unit 602, and an FD 603included in the floating node. This configuration further includes apixel circuit arrangement region 604 and a pixel additional circuitarrangement region 605.

This configuration further includes a light shielding member 600 adisposed on the first substrate, a light shielding member 600 b disposedon the second substrate, and a projection region 600 c defined byvertically projecting the light shielding member 600 a onto the secondsubstrate side. In the present example, the projection region 600 c onthe second substrate side, which is a projection of the light shieldingmember 600 a disposed on the first substrate, partially planarly coversthe pixel additional circuit region 605. The light shielding member 600b disposed on the second substrate covers the remaining part of thepixel additional circuit region 605. In this way, the solid-stateimaging device according to the present example is configured such thatthe entire pixel additional circuit region 605 can be planarly coveredby the light shielding member 600 b and the projection region 600 c.

This configuration can also reduce light to enter the pixel additionalcircuit region 605.

The light shielding member may be embodied by disposing a memberdedicated to light shielding in the same layer as the wiring layer, orby providing wiring that can also serve as a light shielding member.

Especially, according to the fourth example, the pixel additionalcircuit arrangement region 605 can be shielded from light with use ofthe light shielding member constituted by a plurality of wiring layers,thereby improving the light shielding performance. Further, if the pixeladditional circuit arrangement region 605 is located outside theprojection region defined by vertically projecting the photoelectricconversion unit 601 onto the second substrate, like the configurationillustrated in FIGS. 7A and 7B, it is effective to shield the pixeladditional circuit arrangement region 605 from light with use of thelight shielding member constituted by a plurality of wiring layers.

Next, a first variation of the first exemplary embodiment will bedescribed. In this variation, the pixel additional circuit 110 includesa switch and a capacitance as its constituent elements, as is the casewith the above-described first exemplary embodiment. However, thisvariation is configured such that the pixel additional circuit 110 canbe used as a member for the electronic shutter function, especially forthe global electronic shutter function. In this case, a pixel to be readout last in a frame will be held in the pixel additional circuit 110 fora long time, and, therefore, high light shielding performance should beprovided to the pixel additional circuit 110.

FIGS. 8A and 8B each illustrate an example of a drive pulse according tothe present variation. FIG. 8A illustrates a drive pulse supplied to apixel in an n-th row, and FIG. 8B illustrates a drive pulse supplied toa pixel in an (n+1)-th row.

First, before time T1, the pulses supplied to the reset control lines107(n) and 107(n+1) are maintained at the high level, and the V1(n) andthe V1(n+1) are maintained at the high level. Therefore, the electricpotential of the floating nodes 103 is reset to the reference electricpotential.

Then, at time T1, the drive pulses supplied to the reset control lines107(n) and 107(n+1) are changed from the high level to the low level,and the V(n+1) is changed to the low level. As a result, the electricpotential of the floating node 103 is set in a floating state, and thedrain electric potential of the amplifying MOS transistor of the(n+1)-th row is set in an off state. Therefore, the pixel in the(n+1)-th row is set in an unselected state.

Then, at time T2, the pulses supplied to the transfer control lines 106and the control lines 113 of the all pixels are collectively changedfrom the low level to the high level. Subsequently, at time T3, thepulses supplied to the transfer control lines 106 and the control lines113 of the all pixels are collectively changed from the high level tothe low level. As a result, the accumulation periods at thephotoelectric conversion units in the all pixels can be terminated atthe same time. The transferred signal electric charges are held in thecapacitance 112.

Then, at time T4, the pulse supplied to the control line 113(n) ischanged from the low level to the high level. Subsequently, at time T5,the pulse supplied to the control line 113(n) is changed from the highlevel to the low level. As a result, the signal held in the capacitance112 of the n-th row is transferred to the floating node 103. Then, thesignal of the pixel in the n-th row is read out to the common outputline 108 via the amplifying unit 105.

Then, at time T6, the V1(n) is changed from the high level to the lowlevel, and the V1(n+1) is changed from the low level to the high level.As a result, the pixel in the n-th row is set in an unselected state,and the pixel in the (n+1)-th row is set in a selected state.

Then, at time T7, the pulses supplied to the reset control lines 107(n)and 107(n+1) are changed from the low level to the high level.Subsequently, at time T8, the pulses supplied to the reset control lines107(n) and 107(n+1) are changed from the high level to the low level. Asa result, the electric potential of the floating node 103 of the(n+1)-th row is set to the reference electric potential. During theperiod from time T7 to time T8, the pulse supplied to the reset controlline 107(n) may be maintained at the low level without being changed tothe high level. However, it is more effective to change the pulsesupplied to the reset control line 107(n) to the high level, since thiscan ensure that the pixel in the n-th row is in a non-selected state.However, if supply wiring is individually prepared for each of the drainof the amplifying MOS transistor and the drain of the reset MOStransistor, and the drain electric potential of the amplifying MOStransistor is kept constant, a high-level pulse should be supplied tothe reset control line 107(n) as mentioned above.

Then, at time T9, the pulse supplied to the control line 113(n+1) ischanged from the low level to the high level. Subsequently, at time T10,the pulse supplied to the control line 113(n+1) is changed from the highlevel to the low level. As a result, the signal held in the capacitance112 of the pixel in the (n+1)-th row is transferred to the floating node103. Then, the signal of the pixel in the (n+1)-th row is read out tothe common output line 108 via the amplifying unit 105.

This operation allows the pixel additional circuit 110 to be used as asignal holding unit for the electronic shutter function. Further, acontrol unit may be provided to allow the pixel additional circuit 110to be switched to perform the sensitivity switching operation or theelectronic shutter operation, thereby selectively drive these operationsby issuing a control signal.

Next, a second variation of the first exemplary embodiment will bedescribed. The second variation includes a switch and a capacitance asthe pixel additional circuit, like the first exemplary embodiment andthe first variation thereof. Further, the first variation and the secondvariation shares such a common feature that the pixel additional circuitfunctions as the signal holding unit for the electronic shutterfunction. A difference between the first variation and the secondvariation is the connection relationship among the circuits.

FIG. 9 is an equivalent circuit diagram of two pixels according thesecond variation. FIGS. 10A and 10B each illustrate an example of adrive pulse according to the second variation.

The second variation includes a photoelectric conversion unit 801.Further, the second variation includes a first transfer unit 802, afirst floating node 803, a reset unit 804, an amplifying unit 805, aselection unit 806, and a second floating node 807. Further, the secondvariation includes a common output line 808, a current source 809, and apixel additional circuit 810. The pixel additional circuit 810 includesa switch 811 and a capacitance 812. Further, the second variationincludes a switch 813 for an overflow drain.

A pulse .phi.TX1 is supplied to a first transfer control line forcontrolling the conduction of the first transfer unit 802, and a pulse.phi.TX2 is supplied to a second transfer control line for controllingthe conduction of a second transfer unit constituted by the switch 811.A pulse .phi.RES is supplied to a reset control line for controlling theconduction of the reset unit 804. A pulse .phi.SEL is supplied to aselection control line for controlling the conduction of the selectionunit 806. A pulse .phi.OFD is supplied to an OFD control line forcontrolling the conduction to the overflow drain.

An operation of the present variation will be described with referenceto FIGS. 10A and 10B. FIG. 10A illustrates a pulse of the n-th row, andFIG. 10B illustrates a pulse of the (n+1)-th row. First, at time T1, thepulse .phi.RES of the n-th row is changed from the high level to the lowlevel. This causes the electric potential of the second floating node807 of the n-th row to be set into a floating state.

Then, at time T2, the pulses .phi.TX1 of the all rows are changed fromthe low level to the high level. Subsequently, at time T3, the pulses.phi.TX1 of the all rows are changed from the high level to the lowlevel. As a result, the signals of the photoelectric conversion units801 of the all pixels are transferred to the capacities 812 to be heldtherein.

Then, at time T4, the pulses .phi.OFD of the all rows are changed fromthe low level to the high level. This causes the electric chargesgenerated at the photoelectric conversion units 801 after time T4 to bedischarged to the overflow drains.

Then, at time T5, the pulse .phi.TX2 of the n-th row is changed from thelow level to the high level, and at time T6, the pulse .phi.TX2 of then-th row is changed from the high level to the low level. As a result,the signal held in the capacitance 812 of the pixel in the n-th row istransferred to the second floating node 807. The second floating node807 is electrically connected to the gate of the amplifying MOStransistor constituting the amplifying unit 805. The signal transferredto the second floating node 807 is amplified by the amplifying unit 805,and is output to the common output line 808.

Then, at time T7, the pulse .phi.SEL of the n-th row is changed from thehigh level to the low level. This causes the pixel in the n-th row to beset into a non-selected state. At the same time, the pulse .phi.RES ofthe (n+1)-th row is changed from the high level to the low level. Thiscauses the electric potential of the second floating node 807 of thepixel in the (n+1)-th row to be set into a floating state.

Then, at time T8, the pulse .phi.SEL of the (n+1)-th row is changed fromthe low level to the high level. This causes the pixel of the (n+1)-throw to be set into a selected state.

Then, at time T9, the pulse .phi.TX2 of the (n+1)-th row is changed fromthe low level to the high level, and at time T10, the pulse .phi.TX2 ofthe (n+1)-th row is changed from the high level to the low level. As aresult, the signal held in the capacitance 812 of the pixel in the(n+1)-th row is transferred to the second floating node 807. The secondfloating node 807 is electrically connected to the gate of theamplifying MOS transistor constituting the amplifying unit 805. Thesignal transferred to the second floating node 807 is amplified by theamplifying unit 805, and is output to the common output line 808.

As mentioned above, according to the present variation of the firstexemplary embodiment, it is possible to perform an electronic shutteroperation, or especially, a global electronic shutter operation byproviding the pixel additional circuit 810 without reducing thelight-receiving area of the photoelectric conversion unit 810. Further,shielding this pixel additional circuit 810 from light with use of thelight shielding configuration illustrated in FIGS. 4A and 4B to 7A and7B can reduce light transmitted through the photoelectric conversionunit to enter the pixel additional circuit.

FIG. 11 is an equivalent circuit diagram of a pixel according to asecond exemplary embodiment of the present invention. A difference ofthe second exemplary embodiment from the first exemplary embodiment isthe pixel additional circuit and the wiring connection relationshipthereof. In the following description, elements functioning in the sameor similar manner as those in the first exemplary embodiment will beidentified by the same reference numerals as those in the firstexemplary embodiment, and will not be repeatedly described in detail.Suffixes are added to the reference numerals to clearly indicate thatthose elements are different from plurally disposed other elementshaving the same functions.

Like the first exemplary embodiment, the zone pixA indicates elementsdisposed on the first substrate, and the zone pixB indicates elementsdisposed on the second substrate. The main parts in the cross-sectionalconfiguration according to the present exemplary embodiment are the sameas those according to the first exemplary embodiment, and therefore willnot be repeatedly described.

The present exemplary embodiment is configured to include a setconstituted by two photoelectric conversion units 101 and two transferunits 102 corresponding thereto, and include a common amplifying unitand a common reset unit for one set. FIG. 11 illustrates four pixels,but in practical use, a larger number of pixels may be combined toconstruct a pixel array.

A pixel additional circuit 1001 is a switch for controlling the electricconnections of a floating node 103-1 and a floating node 103-2.

When the pulse supplied to control wiring 1002 is changed to the highlevel, the pixel additional circuit 1001 is set into an ON state, andthe conduction of the floating node 103-1 and the conduction of thefloating node 103-2 are established. At this time, for example, thepulses supplied to transfer control lines 106-1 and 106-3 are changed tothe high level, causing the transfer units 102-1 and 102-3 to be setinto an ON state. This allows the signal electric charges of thephotoelectric conversion unit 101-1 and the signal electric charges ofthe photoelectric conversion unit 101-3 to be respectively added at thefloating nodes 103-1 and 103-2.

According to the present exemplary embodiment, the pixel additionalcircuit 1001 is disposed on the second substrate, and, therefore, it ispossible to prevent a reduction in the light-receiving area of thephotoelectric conversion units 101. Further, since this pixel additionalcircuit 1001 is an element electrically connected to the floating nodes103, an entry of light in this region will affect the resulting imagequality. To solve this problem, according to the present exemplaryembodiment, the pixel additional circuit 1001 is disposed on the secondsubstrate, and this arrangement can increase the distance that incidentlight passes through the semiconductor region of the substrate, comparedto a solid-state imaging device including the pixel additional circuitdisposed on the first substrate. Therefore, it becomes possible toincrease the ratio of light absorbed by the semiconductor substrate,thereby improving the light shielding performance. Further, asillustrated in FIGS. 4A and 4B to 7A and 7B, a light shielding membercan be additionally provided to reduce light to enter the pixeladditional circuit 1001 to thereby improve the resulting image quality.

Further, according to the present exemplary embodiment, the pixeladditional circuit 1001 is disposed for each set constituted by adesired number of photoelectric conversion units and transfer units,thereby enabling the number of additions to be arbitrarily changed.

Further, according to the present exemplary embodiment, one amplifyingunit and one reset unit are prepared for two photoelectric conversionunits and two transfer units to be shared by them. However, the numberof photoelectric conversion units and transfer units sharing oneamplifying unit and one reset unit is not limited thereto.

As mentioned above, according to the present exemplary embodiment, it ispossible to add signals at the floating node 103 while preventing areduction in the light-receiving area of the photoelectric conversionunits 101. Further, it is possible to reduce light to enter the pixeladditional circuit 1001, and thereby possible to reduce noises.

FIG. 12 is an equivalent circuit diagram of a pixel according to a thirdexemplary embodiment of the present invention. FIG. 12 illustrates onlyone pixel, but in practical use, a plurality of pixels is combined toconstruct a pixel array. A difference of the third exemplary embodimentfrom the first and second exemplary embodiments is the pixel additionalcircuit 1101 and the connection relationship thereof. More specifically,the pixel additional circuit 1101 in the present exemplary embodimentfunctions as an analog/digital (AD) conversion circuit. In the followingdescription, elements functioning in the same or similar manner as thosein the first and second exemplary embodiments will be identified by thesame reference numerals as those in the first and second exemplaryembodiments, and will not be repeatedly described in detail.

The pixel additional circuit 1100 functions as an AD convertor. Thepixel additional circuit 1100 includes negative-channel metal oxidesemiconductor (NMOS) transistors 1101, 1102, and 1105, PMOS transistors1103 and 1104, and a memory 1109.

A power source V3 supplies power to the sources of the PMOS transistors1103 and 1104.

The amplifying unit 105, the NMOS transistor 1102, and the PMOStransistors 1103 and 1104 constitute a differential amplificationcircuit. The differential amplification circuit has an output node 1108.A signal from the output node 1108 is held in the memory 1109.

A switch 1105 is used to output a signal after AD conversion, which isheld in the memory 1109, to a bus at the subsequent stage.

Reference signal supply wiring 1106 is used to supply a reference signalto the gate of the PMOS transistor.

Bias wiring 1107 supplies predetermined bias to the gate of the NMOStransistor 1101. This enables the NMOS transistor 1101 to operate as acurrent source to supply tail current.

Control wiring 1111 is used to control an operation of the switch 1105.This differential amplification circuit 1101 is set to perform acomparator operation, and thereby can provide an AD conversionoperation. For example, supplying a ramp voltage signal having apredetermined ramp to the reference signal supply wiring 1106 results ina change in the output level of the output node 1108 of the differentialamplification circuit from the high level to the low level. Morespecifically, the output node 1108 provides a high output when thesignal level supplied to the reference signal supply wiring 1106 islower than the floating node 103, while the output node 1108 provides alow output when the signal level supplied to the reference signal supplywiring 1106 is higher than the floating node 103.

The timing of such a change is counted by a not-illustrated counter, andthis counted value is held in the memory 1109, which then realizes ADconversion outputting the counted value as digital data.

Like the previous exemplary embodiments, the present exemplaryembodiment includes the pixel additional circuit 1100 disposed on thesecond substrate, and, therefore, can prevent a reduction in thelight-receiving area of the photoelectric conversion unit 101. Further,since the pixel additional circuit 1100 includes the memory 1109, it isapparent that an entry of light to this region will affect the resultingimage quality. Such a result is also expected when light enters thepixel additional circuit 1100 electrically connected to the memory 1109.To solve this problem, in the present exemplary embodiment, the pixeladditional circuit 1100 including the memory 1109 is disposed on thesecond substrate, which is effective to secure sufficient lightshielding performance. Further, the present exemplary embodiment employsthe light shielding configuration as illustrated in FIGS. 4A and 4B to7A and 7B, which can further enhance the light shielding performance.

The present exemplary embodiment is configured such that the pixeladditional circuit 1100, which provides the AD conversion function,includes a comparator. Alternatively, the pixel additional circuit 1100may be used as an analog differential amplification circuit by a supplyof a desired constant signal to the reference signal supply wiring 1106.Further alternatively, the pixel additional circuit 1100 may beconfigured to be used as, for example, a switched capacitor circuit byan addition of an analog capacitance to the differential amplificationcircuit. In this case, the light shielding performance can be improvedby disposing the analog capacitance on the second substrate.

Having described the present invention in detail and by reference tospecific embodiments thereof, it will be apparent that modifications andvariants are possible without departing from the technical idea or themain features of the present invention. The above-described exemplaryembodiments can be combined in various manners.

More specifically, in the configuration having a common amplificationunit shared by a plurality of photoelectric conversion units, the pixeladditional circuit may be configured to be used to expand the dynamicrange, realize the electronic shutter function, or provide the ADconversion function. According to this configuration, the elements canbe more freely arranged on the second substrate. Further, thesolid-state imaging device can be configured to reduce noises by anincrease in the gate area of the MOS transistor.

While the present invention has been described with reference toexemplary embodiments, it is to be understood that the invention is notlimited to the disclosed exemplary embodiments. The scope of thefollowing claims is to be accorded the broadest interpretation so as toencompass all modifications, equivalent structures, and functions.

This application claims priority from Japanese Patent Application No.2010-222590 filed Sep. 30, 2010, which is hereby incorporated byreference herein in its entirety.

The invention claimed is:
 1. A solid-state imaging device comprising: apixel array including a plurality of pixels, each including aphotoelectric conversion unit; a transfer unit configured to transfersignal electric charges of the photoelectric conversion unit to afloating node; a reset unit configured to set an electric potential ofthe floating node to a reference electric potential; an amplifying unitconfigured to amplify a signal based on the signal electric chargestransferred to the floating node; and a pixel additional circuitconfigured to process the signal electric charges transferred to thefloating node or the signal amplified by the amplifying unit, the pixeladditional circuit being provided in addition to the transfer unit, thefloating node, the reset unit and the amplifying unit, wherein thephotoelectric conversion unit, the transfer unit, and at least part ofthe floating node are disposed on a first substrate, and the pixeladditional circuit is disposed on a second substrate, wherein a firstlight shielding member is disposed on the first substrate, the firstlight shielding member being configured to reduce light transmittedthrough the photoelectric conversion unit to enter the pixel additionalcircuit, wherein a second light shielding member is disposed on thesecond substrate, the second light shielding member being configured toreduce light transmitted through the photoelectric conversion unit toenter the pixel additional circuit, wherein the pixel additional circuitincluded in one pixel of the plurality of pixels includes a firstportion and a second portion, wherein the first portion of the pixeladditional circuit is located within a projection region defined byvertically projecting the first light shielding member onto the secondsubstrate, and the second portion of the pixel additional circuit islocated outside the projection region, wherein the first light shieldingmember reduces light to enter the first portion of the pixel additionalcircuit located within the projection region and is disposed so as tooverlap with the first portion when viewed from a direction along thevertically projecting, wherein the second light shielding member reduceslight to enter the second portion of the pixel additional circuitlocated outside the projection region and is disposed so as to overlapwith the second portion when viewed from the direction along thevertically projecting, and wherein each of the first light shieldingmember and the second light shielding member has a higher lightshielding performance than an insulating layer.
 2. The solid-stateimaging device according to claim 1, wherein the first substrateincludes a first semiconductor substrate, and a first insulating filmdisposed on the first semiconductor substrate, wherein the secondsubstrate includes a second semiconductor substrate, and a secondinsulating film disposed on the second semiconductor substrate, andwherein an electric connection between the first substrate and thesecond substrate is established by a connection of conductors disposedon the first and second insulating films.
 3. The solid-state imagingdevice according to claim 1, wherein the pixel additional circuitincludes a capacitance for holding the signal electric charges or thesignal amplified by the amplifying unit.
 4. The solid-state imagingdevice according to claim 1, wherein the pixel additional circuitincludes a differential amplification circuit.
 5. The solid-stateimaging device according to claim 1, wherein the pixel additionalcircuit has an analog/digital conversion function.
 6. The solid-stateimaging device according to claim 1, wherein the pixel additionalcircuit adds electric charges generated at a plurality of photoelectricconversion units.
 7. The solid-state imaging device according to claim1, wherein the reset unit and the amplifying unit are disposed on thesecond substrate.
 8. The solid-state imaging device according to claim1, wherein a set of the reset unit, the amplifying unit, and the pixeladditional circuit is provided for each of a plurality of photoelectricconversion units.
 9. A solid-state imaging device comprising: a pixelarray including a plurality of pixels, each including a photoelectricconversion unit; a transfer unit configured to transfer signal electriccharges of the photoelectric conversion unit to a floating node; a resetunit configured to set an electric potential of the floating node to areference electric potential; an amplifying unit configured to amplify asignal based on the signal electric charges transferred to the floatingnode; and a pixel additional circuit configured to process the signalelectric charges transferred to the floating node or the signalamplified by the amplifying unit, the pixel additional circuit beingprovided in addition to the transfer unit, the floating node, the resetunit and the amplifying unit, wherein the photoelectric conversion unit,the transfer unit, and at least part of the floating node are disposedon a first substrate, and the pixel additional circuit is disposed on asecond substrate, wherein a first light shielding member is disposed onthe first substrate, the first light shielding member being configuredto reduce light transmitted through the photoelectric conversion unit toenter the pixel additional circuit, wherein a second light shieldingmember is disposed on the second substrate, the second light shieldingmember being configured to reduce light transmitted through thephotoelectric conversion unit to enter the pixel additional circuit,wherein the pixel additional circuit included in one pixel of theplurality of pixels includes a first portion and a second portion,wherein the first portion of the pixel additional circuit is locatedwithin a projection region defined by vertically projecting the firstlight shielding member onto the second substrate, and the second portionof the pixel additional circuit is located outside the projectionregion, wherein the first light shielding member reduces light to enterthe first portion of the pixel additional circuit located within theprojection region, and is disposed so as to overlap with the firstportion when viewed from a direction along the vertically projecting,wherein the second light shielding member reduces light to enter thesecond portion of the pixel additional circuit located outside theprojection region and is disposed so as to overlap with the secondportion when viewed from the direction along the vertically projecting,wherein the first substrate includes a first semiconductor substrate,and a first insulating film disposed on the first semiconductorsubstrate, wherein the second substrate includes a second semiconductorsubstrate, and a second insulating film disposed on the secondsemiconductor substrate, wherein an electric connection between thefirst substrate and the second substrate is established by a connectionof conductors disposed on the first and second insulating films, whereinthe pixel additional circuit includes a capacitance for holding thesignal electric charges or the signal amplified by the amplifying unit,and wherein each of the first light shielding member and the secondlight shielding member has a higher light shielding performance than thefirst insulating film and the second insulating film.
 10. A solid-stateimaging device comprising: a pixel array including a plurality ofpixels, each including a photoelectric conversion unit; a transfer unitconfigured to transfer signal electric charges of the photoelectricconversion unit to a floating node; a reset unit configured to set anelectric potential of the floating node to a reference electricpotential; an amplifying unit configured to amplify a signal based onthe signal electric charges transferred to the floating node; and apixel additional circuit configured to process the signal electriccharges transferred to the floating node or the signal amplified by theamplifying unit, the pixel additional circuit being provided in additionto the transfer unit, the floating node, the reset unit and theamplifying unit, wherein the photoelectric conversion unit, the transferunit, and at least part of the floating node are disposed on a firstsubstrate, and the pixel additional circuit is disposed on a secondsubstrate, wherein a first metal member is disposed on the firstsubstrate, wherein a second metal member is disposed on the secondsubstrate, wherein the pixel additional circuit included in one pixel ofthe plurality of pixels includes a first portion and a second portion,wherein the first portion of the pixel additional circuit is locatedwithin a projection region defined by vertically projecting the firstmetal member onto the second substrate, and the second portion of thepixel additional circuit is located outside the projection region,wherein the first metal member is disposed so as to overlap with thefirst portion of the pixel additional circuit located within theprojection region when viewed from a direction along the verticallyprojecting, wherein the second metal member is disposed so as to overlapwith the second portion of the pixel additional circuit located outsidethe projection region when viewed from the direction along thevertically projecting, and wherein the first metal member and the secondmetal member are disposed in different layers.